Room Temperature Deposition of Thin-film Indium-tin Oxide on Micro-fabricated Color Filters and Its Application to Flat-panel

Abstract

Direct deposition of indium-tin oxide(ITO) thin film on color filter is of practical use in the construction of advanced flat-panel display.Room-temperature DC magnetron sputtering of thin-film ITO and issues related to the integration of such ITO on glass panel containing micro-fabricated color filters(CFs) and other functional materials have been investigated.The resulting polycrystalline ITO exhibit good adhesion to the underlying CFs,as well as good optical transparency and high electrical conductivity,the sheet resistance of ITO on CFs is about 120 Ω/□,and the transmittance is higher than 85% at wavelengths of 450 nm (B),530 nm (G) and 630 nm (R).Application of this ITO deposition technology to color liquid-crystal displays(LCD) and organic light-emitting displays(OLED) were also presented.